• Welcome to TechPowerUp Forums, Guest! Please check out our forum guidelines for info related to our community.

Huawei Prepares EUV Scanner for Sub-7 nm Chinese Chips

AleksandarK

News Editor
Staff member
Joined
Aug 19, 2017
Messages
2,641 (0.99/day)
Huawei, the Chinese technology giant, has reportedly filed patents that it is developing extreme ultraviolet (EUV) scanners for use in the manufacturing process of semiconductors. This news comes amid increasing tensions between Huawei and the US government, which has imposed a series of sanctions on the company in recent years. According to UDN, Huawei has filed a patent that covers the entire EUV scanner with a 13.5 nm EUV light source, mirrors, lithography for printing circuits, and proper system control. While filing a patent is not the same as creating an accurate EUV scanner, it could enable China to produce a class of chips below 7 nm and have a homegrown semiconductor production, despite the ever-increasing US sanctions.

The development of EUV scanners is a significant milestone for Huawei and the semiconductor industry. However, the company's progress in this area may be hindered by the US government's sanctions, which have limited Huawei's access to certain technologies and markets. It is important to note that Chinese SMIC wanted to develop EUV fabrication based on third-party EUV tools; however, those plans were scrapped as the Wassenaar agreement came into action and prohibited the sales of advanced tools to Chinese companies. Huawei's development could represent a new milestone for the entire Chinese industry.



View at TechPowerUp Main Site | Source
 
Low quality post by ARF

ARF

Joined
Jan 28, 2020
Messages
4,670 (2.61/day)
Location
Ex-usa | slava the trolls
The Chinese will save the world! They are good people and good workers for the world.

It is time for the island civilisation to leave the areas which are not inside their natural borders.
 
Joined
Nov 1, 2018
Messages
584 (0.26/day)
The ASML monopoly is ridiculous, and I don't understand how it is legal.
Governments of the world should force them to share the tech with at least one another (western) company, just like they did with Intel and x86

But anyway, gratz to Huawei for pushing the tech as well !
 

ARF

Joined
Jan 28, 2020
Messages
4,670 (2.61/day)
Location
Ex-usa | slava the trolls
The ASML monopoly is ridiculous, and I don't understand how it is legal.
Governments of the world should force them to share the tech with at least one another (western) company

It doesn't matter, actually. The cartel is there (closed ecosystem), nevertheless, between ASML and its protegees IBM, Apple, Qualcomm, AMD, Intel and nvidia.
 
Joined
May 17, 2021
Messages
3,018 (2.30/day)
Processor Ryzen 5 5700x
Motherboard B550 Elite
Cooling Thermalright Perless Assassin 120 SE
Memory 32GB Fury Beast DDR4 3200Mhz
Video Card(s) Gigabyte 3060 ti gaming oc pro
Storage Samsung 970 Evo 1TB, WD SN850x 1TB, plus some random HDDs
Display(s) LG 27gp850 1440p 165Hz 27''
Case Lian Li Lancool II performance
Power Supply MSI 750w
Mouse G502
The ASML monopoly is ridiculous, and I don't understand how it is legal.
Governments of the world should force them to share the tech with at least one another (western) company, just like they did with Intel and x86

But anyway, gratz to Huawei for pushing the tech as well !

It isn't a monopoly, other companies make the same products. There is just no one competing at their level.


Anyway good for the Chinese, we need competition. The problem is that ASML depends on a lot of other companies around the world to make their machines. Zeiss being the most notable.
 
Joined
Sep 1, 2020
Messages
2,387 (1.52/day)
Location
Bulgaria
It isn't a monopoly, other companies make the same products. There is just no one competing at their level.
How much be percentage of market dominance to be called monopoly? I'll suppose enough below 100%.
It's kind of like owning a gold stock and being able to impose yourself on the small shareholders and even make rules for personal use by lobbying congress. It's called abuse of a dominant position.
 
Joined
May 17, 2021
Messages
3,018 (2.30/day)
Processor Ryzen 5 5700x
Motherboard B550 Elite
Cooling Thermalright Perless Assassin 120 SE
Memory 32GB Fury Beast DDR4 3200Mhz
Video Card(s) Gigabyte 3060 ti gaming oc pro
Storage Samsung 970 Evo 1TB, WD SN850x 1TB, plus some random HDDs
Display(s) LG 27gp850 1440p 165Hz 27''
Case Lian Li Lancool II performance
Power Supply MSI 750w
Mouse G502
How much be percentage of market dominance to be called monopoly? I'll suppose enough below 100%.
It's kind of like owning a gold stock and being able to impose yourself on the small shareholders and even make rules for personal use by lobbying congress. It's called abuse of a dominant position.

if hundreds of companies makes cars but only one of them makes a car that goes 400kms/h is that a monopoly? or dozens make tv panels but only one makes qd oled with whatever best specs?

I don't have the list but there are several competitors making the same products, a quick google search will show them to you.

I don't think you can even remotely call them a monopoly. And it's always evolving, in the next high end revolution they can be left behind, they weren't always the top dog
 
Joined
Dec 25, 2022
Messages
11 (0.02/day)
System Name Trash
Processor Intel Core i7 4700MQ (Wow! It works on 3.4GHz each core!!!)
Motherboard HM86
Cooling One fan two copper pipe
Memory Micron 16GB DDR3L 1600MHz
Video Card(s) GTX 950M 2GB (Oh! It have 45W TDP!!!) ; Intel HD 4600
Storage WD SA530 512GB
Display(s) LG D02DA (17.3'', TN, 60Hz, 1080P, LVDS)
Case Clevo W670SC
Audio Device(s) two sounds
Power Supply Chicony A17-150P2A
Mouse 双飞燕FG10S
Software Windows10 Professional 22H2
Benchmark Scores 3DMark11 X Graphics Score 1683 CineBench R20 Score 1553
As a Chinese and a Huawei fan, I very much hope that China can have its own complete chip industry chain. But let's be cool. This is just a patent. At present, Arf DUV lithography machine with 193nm wavelength cannot be manufactured in mainland China.

Even if the government is ambitious, it will be far too difficult to produce. The EUV lithography machine may be far away from the Chinese mainland, and I am optimistic that it will be produced by 2030.
 
Joined
Jun 11, 2019
Messages
636 (0.32/day)
Location
Moscow, Russia
Processor Intel 12600K
Motherboard Gigabyte Z690 Gaming X
Cooling CPU: Noctua NH-D15S; Case: 2xNoctua NF-A14, 1xNF-S12A.
Memory Ballistix Sport LT DDR4 @3600CL16 2*16GB
Video Card(s) Palit RTX 4080
Storage Samsung 970 Pro 512GB + Crucial MX500 500gb + WD Red 6TB
Display(s) Dell S2721qs
Case Phanteks P300A Mesh
Audio Device(s) Behringer UMC204HD
Power Supply Fractal Design Ion+ 560W
Mouse Glorious Model D-
ASML has a monopoly in EUV but in less advanced tech they have a lot of competition. I don't agree with Bomby's analogy though: entire markets are now dependent on ASML through supply chains. Saying that enabling production of nearly all smartphones, consoles and all of new hardware for computers, servers, data centers and so on is akin to a niche supercar manufacturer is quite a stretch. They might be overtaken in the future, sure, there are others investing hundreds of millions in tech beyond EUV, which will hit its limits, but so does ASML and they're already in profit.
 
Joined
Mar 10, 2010
Messages
11,878 (2.20/day)
Location
Manchester uk
System Name RyzenGtEvo/ Asus strix scar II
Processor Amd R5 5900X/ Intel 8750H
Motherboard Crosshair hero8 impact/Asus
Cooling 360EK extreme rad+ 360$EK slim all push, cpu ek suprim Gpu full cover all EK
Memory Corsair Vengeance Rgb pro 3600cas14 16Gb in four sticks./16Gb/16GB
Video Card(s) Powercolour RX7900XT Reference/Rtx 2060
Storage Silicon power 2TB nvme/8Tb external/1Tb samsung Evo nvme 2Tb sata ssd/1Tb nvme
Display(s) Samsung UAE28"850R 4k freesync.dell shiter
Case Lianli 011 dynamic/strix scar2
Audio Device(s) Xfi creative 7.1 on board ,Yamaha dts av setup, corsair void pro headset
Power Supply corsair 1200Hxi/Asus stock
Mouse Roccat Kova/ Logitech G wireless
Keyboard Roccat Aimo 120
VR HMD Oculus rift
Software Win 10 Pro
Benchmark Scores 8726 vega 3dmark timespy/ laptop Timespy 6506
ASML has a monopoly in EUV but in less advanced tech they have a lot of competition. I don't agree with Bomby's analogy though: entire markets are now dependent on ASML through supply chains. Saying that enabling production of nearly all smartphones, consoles and all of new hardware for computers, servers, data centers and so on is akin to a niche supercar manufacturer is quite a stretch. They might be overtaken in the future, sure, there are others investing hundreds of millions in tech beyond EUV, which will hit its limits, but so does ASML and they're already in profit.
That's not a monopoly though, it's market dominance and ASML spent billions that others didn't to move their tech forward.
They're not the only scanner maker but they're definitely the best and if Huawei has anything remotely close to performance out in the next five years that's some extremely dubious research they enacted(and I mean acquired via actions not self designed)
 
Joined
Sep 1, 2020
Messages
2,387 (1.52/day)
Location
Bulgaria
That's not a monopoly though, it's market dominance and ASML spent billions that others didn't to move their tech forward.
They're not the only scanner maker but they're definitely the best and if Huawei has anything remotely close to performance out in the next five years that's some extremely dubious research they enacted(and I mean acquired via actions not self designed)
Reason for that other companies to not spend so much billions maybe is because they didn't have it.
So, they are forced to stay in the markets where they managed to occupy a niche. Thus, in practice, ASML can be no real competition.
 
Joined
May 17, 2021
Messages
3,018 (2.30/day)
Processor Ryzen 5 5700x
Motherboard B550 Elite
Cooling Thermalright Perless Assassin 120 SE
Memory 32GB Fury Beast DDR4 3200Mhz
Video Card(s) Gigabyte 3060 ti gaming oc pro
Storage Samsung 970 Evo 1TB, WD SN850x 1TB, plus some random HDDs
Display(s) LG 27gp850 1440p 165Hz 27''
Case Lian Li Lancool II performance
Power Supply MSI 750w
Mouse G502
Reason for that other companies to not spend so much billions maybe is because they didn't have it.
So, they are forced to stay in the markets where they managed to occupy a niche. Thus, in practice, ASML can be no real competition.

ASML didn't win the lottery and they dethroned the biggest players. Why can't anyone else do the same?

ASML has a monopoly in EUV but in less advanced tech they have a lot of competition. I don't agree with Bomby's analogy though: entire markets are now dependent on ASML through supply chains. Saying that enabling production of nearly all smartphones, consoles and all of new hardware for computers, servers, data centers and so on is akin to a niche supercar manufacturer is quite a stretch. They might be overtaken in the future, sure, there are others investing hundreds of millions in tech beyond EUV, which will hit its limits, but so does ASML and they're already in profit.

So is TSMC a monopoly? no one can compete with them in the smaller nodes?

The examples are endless, companies with a lot of competition but having an edge. That's not a monopoly in my view.
Any smartphone, console, pc, server, etc... can buy a product that didn't use ASML's products, they just won't be the top tier.
 
Joined
Sep 1, 2020
Messages
2,387 (1.52/day)
Location
Bulgaria
ASML didn't win the lottery and they dethroned the biggest players. Why can't anyone else do the same?
This is just historical fact. In time when released was more cheaper to do. Now is too late and too expensive to fix maybe wrong decisions of other companies to do not make heavy competition when this was possible.
 
Joined
May 17, 2021
Messages
3,018 (2.30/day)
Processor Ryzen 5 5700x
Motherboard B550 Elite
Cooling Thermalright Perless Assassin 120 SE
Memory 32GB Fury Beast DDR4 3200Mhz
Video Card(s) Gigabyte 3060 ti gaming oc pro
Storage Samsung 970 Evo 1TB, WD SN850x 1TB, plus some random HDDs
Display(s) LG 27gp850 1440p 165Hz 27''
Case Lian Li Lancool II performance
Power Supply MSI 750w
Mouse G502
This is just historical fact. In time when released was more cheaper to do. Now is too late and too expensive to fix maybe wrong decisions of other companies to do not make heavy competition when this was possible.

That's not the right answer, it's not about money, or better it is if you want to always be chasing ASML like so many do. But this tech is not on a single path, anyone can (and i bet, eventually will) come with a better different tech and it will happen to ASLM what happened to so many other leaders.
But if ASML keeps one step ahead all the time, that's because all the competitors suck, not because they lack money.
 
Joined
Mar 10, 2010
Messages
11,878 (2.20/day)
Location
Manchester uk
System Name RyzenGtEvo/ Asus strix scar II
Processor Amd R5 5900X/ Intel 8750H
Motherboard Crosshair hero8 impact/Asus
Cooling 360EK extreme rad+ 360$EK slim all push, cpu ek suprim Gpu full cover all EK
Memory Corsair Vengeance Rgb pro 3600cas14 16Gb in four sticks./16Gb/16GB
Video Card(s) Powercolour RX7900XT Reference/Rtx 2060
Storage Silicon power 2TB nvme/8Tb external/1Tb samsung Evo nvme 2Tb sata ssd/1Tb nvme
Display(s) Samsung UAE28"850R 4k freesync.dell shiter
Case Lianli 011 dynamic/strix scar2
Audio Device(s) Xfi creative 7.1 on board ,Yamaha dts av setup, corsair void pro headset
Power Supply corsair 1200Hxi/Asus stock
Mouse Roccat Kova/ Logitech G wireless
Keyboard Roccat Aimo 120
VR HMD Oculus rift
Software Win 10 Pro
Benchmark Scores 8726 vega 3dmark timespy/ laptop Timespy 6506
Reason for that other companies to not spend so much billions maybe is because they didn't have it.
So, they are forced to stay in the markets where they managed to occupy a niche. Thus, in practice, ASML can be no real competition.
Maybe so then how , where is Huawei research money, what have they spent, when, where.

What patents were filed, do you understand complexity of the EUV light source?! That alone has taken a decade of research and billions in r n d.

Yes ASML have no competition, and.

You want me to bring up all the reasons why and areas in which china/Huawei have no reasonable competition.
 
Joined
Jan 3, 2021
Messages
3,586 (2.48/day)
Location
Slovenia
Processor i5-6600K
Motherboard Asus Z170A
Cooling some cheap Cooler Master Hyper 103 or similar
Memory 16GB DDR4-2400
Video Card(s) IGP
Storage Samsung 850 EVO 250GB
Display(s) 2x Oldell 24" 1920x1200
Case Bitfenix Nova white windowless non-mesh
Audio Device(s) E-mu 1212m PCI
Power Supply Seasonic G-360
Mouse Logitech Marble trackball, never had a mouse
Keyboard Key Tronic KT2000, no Win key because 1994
Software Oldwin
Huawei has filed a patent that covers the entire EUV scanner with a 13.5 nm EUV light source, mirrors, lithography for printing circuits, and proper system control.
Huh, they managed to stuff a lot in one patent. Even if it's 3333 pages long.

the world record for this is Micron, Micron Technologies. A decade or so ago got granted a patent on pseudo random number generator that was three thousand three hundred thirty three pages.

The ASML monopoly is ridiculous, and I don't understand how it is legal.
Governments of the world should force them to share the tech with at least one another (western) company, just like they did with Intel and x86
OK, I can agree with that to a large extent. It's ridiculous because it has lasted so long and still there's no competitor apparently in sight. But what should ASML do? Share enough information with Nikon to enable them to build an EUV scanner too? It would still take Nikon several years to actually build the components and the system, and also to build the supply chain.
 
Joined
Sep 26, 2022
Messages
225 (0.28/day)
ASML has no competition, not really because of a conspiracy or a cartel but because what this company is doing...well, not many have that knowledge and plans to make a ASML rival can take more than 10 years to really take form

They have competitors but they are not really relevant for modern company's demands compared to ASML.

This is ultra high tech. China has billions and an unlimited workforce (and, let's be honest, state-sponsored patents theft too) to fight ASML
 
Joined
Oct 6, 2021
Messages
1,605 (1.37/day)
The ASML monopoly is ridiculous, and I don't understand how it is legal.
Governments of the world should force them to share the tech with at least one another (western) company, just like they did with Intel and x86

But anyway, gratz to Huawei for pushing the tech as well !
That's not monopoly, it's just being much better than the competition. :p
 
Joined
Jul 19, 2006
Messages
43,609 (6.48/day)
Processor AMD Ryzen 7 7800X3D
Motherboard ASUS TUF x670e-Plus Wifi
Cooling EK AIO 360. Phantek T30 fans.
Memory 32GB G.Skill 6000Mhz
Video Card(s) Asus RTX 4090
Storage WD/Samsung m.2's
Display(s) LG C2 Evo OLED 42"
Case Lian Li PC 011 Dynamic Evo
Audio Device(s) Topping E70 DAC, SMSL SP200 Amp, Adam Audio T5V's, Hifiman Sundara's.
Power Supply FSP Hydro Ti PRO 1000W
Mouse Razer Basilisk V3 Pro
Keyboard Epomaker 84 key
Software Windows 11 Pro
That's not monopoly, it's just being much better than the competition. :p
When you don't allow competition, sure. Perpetual winner. Up until someone does it on their own... and if I were that person, I'd make sure that monopoly dies as quickly as possible by offering the tech up to anyone who wants to pay for it.
 
Joined
Aug 11, 2014
Messages
64 (0.02/day)
Reason for that other companies to not spend so much billions maybe is because they didn't have it.
So, they are forced to stay in the markets where they managed to occupy a niche. Thus, in practice, ASML can be no real competition.

Do you realize the other manufacturers that also do Lithography are/include Canon and Nikon? They're not third rate companies with limited cash flow.
 
Joined
Sep 1, 2020
Messages
2,387 (1.52/day)
Location
Bulgaria
Do you realize the other manufacturers that also do Lithography are/include Canon and Nikon? They're not third rate companies with limited cash flow.
I think that you must read me more times. Maybe after ten thousand reads you will be able to understand my point.
 
Joined
Oct 6, 2021
Messages
1,605 (1.37/day)
When you don't allow competition, sure. Perpetual winner. Up until someone does it on their own... and if I were that person, I'd make sure that monopoly dies as quickly as possible by offering the tech up to anyone who wants to pay for it.
What? Who is preventing the competition?

I hope you're not talking about the patents(IP) that cost billions in research investment to obtain.
 
Joined
Sep 1, 2020
Messages
2,387 (1.52/day)
Location
Bulgaria
What? Who is preventing the competition?
Everything is extremely simple. It doesn't even need to be actively argued that only ASML has the necessary technologies for the bleeding edge, attracting investment and orders. Thus, competing companies have difficulties in raising active capital for the research, design and reorganization of production they need. Think of ASML as a black hole, with gravity engulfing everything in its reach.
 
Joined
Aug 11, 2014
Messages
64 (0.02/day)
I think that you must read me more times. Maybe after ten thousand reads you will be able to understand my point.

You should write more convoluted sentences, maybe people would understand you less clearly.

It's not like other manufacturers of lithography tool don't spend money in EUV R&D and alternatives. Calling ASML a "monopoly" when other Lithography manufacturers clearly didn't manage to pull anything as good as ASML when it comes to EUV is quite retarded. They're not building cranks.
It's only a monopoly because they're the only one who could pull it off, they're not in a monopoly position because they undermined other manufacturers. Like Apple, Google and the like do to keep they products in a dominant position.


 
Last edited:
Joined
May 13, 2014
Messages
21 (0.01/day)
System Name Project Taco
Processor i7 4770k
Motherboard Gigabyte G1 Sniper 5 z87
Cooling Corsair H100i w/Noiseblocker eLoop
Memory Avexir Core Series White LED 4x4GB 1600mhz
Video Card(s) 2x EVGA Nvidia GTX 780 TI Classified
Storage Samsung 840 EVO 500GB
Display(s) 2 QNIX QX2710
Case NZXT H440
Audio Device(s) O2/ODAC
Power Supply EVGA Supernova 1000W Gold
Some thoughts on the article itself:
  • Fundamentally, at best Huawei has filed a patent for about ONE THIRD of an EUV lithography tool. These tools are normally broken up into 3 core components: Scanner (Where the wafers are and the patterning happens), Source (where the actual EUV light is generated), and the Drive Laser (where the lasers are generated and amplified to create the light in the Source). The Scanner section is the part "most similar" to traditional DUV lithography. So among all the parts, this is the part that is the least foreign/different.
  • This may seem like a major milestone, but to me at least it's not really that big a deal. This is a patent showing how they would go about making it, but that's more akin to step -1. If you think about it, there is so much more to these tools than just the design alone. Let's remember for a moment that the goal of these tools is to fire two lasers to hit a single droplet of tin with a diameter smaller than a human hair TWICE. The light that's created from this then has to be reflected AS EFFICIENTLY AS POSSIBLE into the scanner, positioned properly and then passed through a reticle and then down onto a wafer. This happens 50,000 TIMES A SECOND. Think about that for a minute. How much complexity is involved with maintaining this process PERFECTLY? There is ludicrous amounts of programming, timing, and environmental monitoring that has to go into just making sure this whole process is done properly, and they've filed a patent for a single section of the entire tool.
On the discussion of a monopoly: there really isn't any argument/question here. ASML is a monopoly. More specifically, ASML is considered either a Natural Monopoly or a Pure Monopoly. Taken from Investopedia:
A natural monopoly develops in reliance on unique raw materials, technology, or specialization. Companies that have patents or extensive research and development costs such as pharmaceutical companies are considered natural monopolies.
A pure monopoly is a single seller in a market or sector with high barriers to entry such as significant startup costs whose product has no substitutes.
(Source)

This defines ASML PERFECTLY. Globally, it's not like (outside of China) are actively prevented from being able to develop their own tooling. In fact competitors mentioned earlier like Nikon and Cannon back in the day were actively developing their own EUV designs, however the ludicrous amount of money needed to R&D these tools dissuaded them (Source). However, for a company to be in a monopoly position doesn't rely on nefarious intent, it's not the inputs that matter, merely the final result/state of the market.

If China/Chinese companies are able to develop their own EUV tooling, power to them I guess. The bigger question here will be whether or not they're doing so without peeking at ASML's designs, it's well known within industry (not only this industry but dozens of others) that Chinese companies are more than happy to "co-opt" designs/schematics/IP from other foreign companies and use it as a basis for their own.
 
Top