DNP Achieves Fine Pattern Resolution on EUV Lithography Photomasks for Beyond 2nm Generation
Dai Nippon Printing Co., Ltd. (DNP) has successfully achieved the fine pattern resolution required for photomasks for logic semiconductors of the beyond 2 nm (nm: 10-9 meter) generation that support Extreme Ultra-Violet (EUV) lithography, a cutting-edge process in semiconductor manufacturing.
DNP has also completed the criteria evaluation for photomasks compatible with High-Numerical Aperture, the application being considered for next-generation semiconductors beyond the 2 nm generation, and has commenced the supply of evaluation photomasks. High-NA EUV lithography makes it possible to form fine patterns on silicon wafers with a higher resolution than previously possible, and is expected to lead to the realization of high-performance, low-power semiconductors.
DNP has also completed the criteria evaluation for photomasks compatible with High-Numerical Aperture, the application being considered for next-generation semiconductors beyond the 2 nm generation, and has commenced the supply of evaluation photomasks. High-NA EUV lithography makes it possible to form fine patterns on silicon wafers with a higher resolution than previously possible, and is expected to lead to the realization of high-performance, low-power semiconductors.